Metrology, inspection, and process control for microlithography XXIII (23-26 February 2009, San Jose, California, United States)Allgair, John Alexander; Raymond, Christopher J.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 2 vol, 2, isbn 978-0-8194-7525-1 0-8194-7525-4Conference Proceedings

Metrology, inspection, and process control for microlithography XXII (25-28 February 2008, San Jose, California, USA)Allgair, John Alexander; Raymond, Christopher J.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7107-9, 2 v, isbn 978-0-8194-7107-9Conference Proceedings

Instrumentation, metrology, and standards for nanomanufacturing (29-30 August 2007, San Diego, California, USA)Postek, Michael T; Allgair, John.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6796-6, 1Vol, various pagings, isbn 978-0-8194-6796-6Conference Proceedings

Towards Accurate Feature Shape MetrologyORJI, Ndubuisi G; DIXSON, Ronald G; BUNDAY, Benjamin D et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692208.1-692208.9, issn 0277-786X, isbn 978-0-8194-7107-9Conference Paper

Combining coordinate measurement and nanometrology for large-range nanoscale metrologyGRUHLKE, Martin; ROTHE, Hendrik.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480I.1-66480I.10, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Instrumentation, Metrology, and Standards : Key Elements for the Future of NanomanufacturingPOSTEK, Michael T; LYONS, Kevin.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664802.1-664802.7, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

The Helium Ion Microscope : A New Tool for NanomanufacturingPOSTEK, Michael T; VLADAR, Andras E; KRAMAR, John et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664806.1-664806.6, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Laser Diagnostics for Flame Synthesis of Nanostructured Materials : Instrumentation, Metrology, and Process ControlXIAOFEI LIU.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7042, pp 70420G.1-70420G.11, issn 0277-786X, isbn 978-0-8194-7262-5 0-8194-7262-X, 1VolConference Paper

Image library approach to evaluating parametric uncertainty in metrology of isolated feature widthPOTZICK, James.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 727218.1-727218.8, 2Conference Paper

Empirical data validation for model buildingKAZARIAN, Aram.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69221I.1-69221I.6, issn 0277-786X, isbn 978-0-8194-7107-9Conference Paper

Instrumentation, metrology, and standards for nanomanufacturing III (3-5 August 2009, San Diego, California, United States)Postek, Michael T; Allgair, John Alexander.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, various pagings, isbn 978-0-8194-7695-1 0-8194-7695-1Conference Proceedings

Integration, Interoperability, and Information Management : What are the key issues for Nanomanufacturing?LYONS, Kevin W.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480D.1-66480D.5, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscopeTODUA, P. A; FILIPPOV, M. N; GAVRILENKO, V. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480S.1-66480S.12, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Microstructure of 100 nm damascene copper overburden and linesGEISS, R. H; READ, D. T.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664808.1-664808.10, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Nano-Precision Dynamic Motion ControlLIN, Chi-Ying; TSAO, Tsu-Chin.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480H.1-66480H.8, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Revivals of Molecular Nonlinear Optics in Physics, Chemistry and Life SciencesZYSS, Joseph.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7042, pp 704002.1-704002.15, issn 0277-786X, isbn 978-0-8194-7262-5 0-8194-7262-X, 1VolConference Paper

In silico design of metal-dielectric nanocomposites for solar energy applicationsTRICE, Justin; GARCIA, Hernando; SURESHKUMAR, Radhakrishna et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480L.1-66480L.8, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Infrared Reflectivity Spectroscopy of Optical Phonons in Short-period AlGaN/GaN SuperlatticesHERZOG, J. B; MINTAIROV, A. M; SUN, K et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664803.1-664803.8, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Length calibration standards for nano-manufacturingJOY, David C; DEO, Sachin; GRIFFIN, Brendan J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664807.1-664807.7, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Near-field birefringence response in thickness direction of liquid crystal thin filmJING QIN; UMEDA, Norihiro.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664804.1-664804.9, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Optimal Architecture of a Neural Network for a High Precision in Ellipsometric ScatterometryGEREIGE, Issam; ROBERT, Stéphane; GRANET, Gérard et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480G.1-66480G.11, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctionsPONG, Philip W. T; SCHMOUELI, Moshe; MARCUS, Eliezer et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480P.1-66480P.12, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscopeGAVRILENKO, V. P; FILIPPOV, M. N; NOVIKOV, Yu. A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480T.1-66480T.12, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Modelling of angle-resolved X-ray photoelectron spectroscopy (ARXPS) intensity ratios for nanocharacterisation of closely packed shell-core nanofibresJIAN WANG; CUMPSON, Peter J.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66480F.1-66480F.10, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper

Nanomanufacturing via fast laser-induced self-organization in thir metal filmsFAVAZZA, C; KRISHNA, H; SURESHKUMAR, R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 664809.1-664809.8, issn 0277-786X, isbn 978-0-8194-6796-6, 1VolConference Paper